Water cooled high precision z-theta stage

Details Water cooled high precision z-theta stage Water cooled high precision z-theta stage

2005-06-29

2008-09-02

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C219S121670

Reexamination Certificate

active

07420298

ABSTRACT:
A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages, a carriage supported between the parallel translation stages, and a rotation stage carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity.

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patent: 2005/0236910 (2005-10-01), Botos et al.

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