Watchdog system having data differentiating means for use in mon

Details Watchdog system having data differentiating means for use in mon Watchdog system having data differentiating means for use in mon

1995-09-29

1998-03-10

Voeltz, Emanuel T.

Boots, shoes, and leggings

437 8, 437209, 324 731, 3241581, H01L 2166, H01L 21304

Patent

active

057269203

ABSTRACT:
In a final wafer sort (FWS) testing facility, the raw log-out data that is output by FWS test stations is augmented with additional differentiating data to thereby produce differentiable log-outs that can be sorted according to a variety of criteria including: product number or product family, time of test, specific wafer, specific production lot, intra-reticle site number, machine operator, and the specific swappable units of equipment that participated in the FWS testing. The differentiable log-outs are stored in a database and are periodically accessed by an automatic watchdog system that tests for exception conditions calling for immediate or long-term response. Corresponding alarm signals and trend reports are automatically generated and distributed to responsible personnel and/or reactive machine-systems as appropriate. The alarm distribution mechanism includes automatic paging of personnel by wireless beeper and/or e-mail. Immediate response alarms include exception conditions detected for accumulated bin counts on a per-wafer or per-lot basis. Long term alert reports include those that detect increased error rates and possible wear down of replaceable probe cards.

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