Washing unit for joint seal in a semiconductor bath system

Details Washing unit for joint seal in a semiconductor bath system Washing unit for joint seal in a semiconductor bath system

1997-05-23

1999-02-09

Snay, Jeffrey

Cleaning and liquid contact with solids

Processes

Work handled in bulk or groups

134 34, 1341041, 134135, 134902, 118429, B05C 300

Patent

active

058688617

ABSTRACT:
The present invention provides for a semiconductor bath system which has a tank, a housing which joins the tank, and a seal for the joint between the housing and the tank. A porous conduit is placed in close proximity with the seal. A pump drives washing fluid through the conduit and through the walls of the conduit so that the fluid irrigates the seal to preserve its integrity.

REFERENCES:
patent: 4305413 (1981-12-01), Dougherty
patent: 4668303 (1987-05-01), Weber
patent: 5054519 (1991-10-01), Berman
patent: 5205306 (1993-04-01), Peterson
patent: 5393347 (1995-02-01), Miranda
patent: 5638843 (1997-06-01), Strickland

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