Washing system

Details Washing system Washing system

1993-03-05

1994-04-12

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

1341023, 134166R, 134902, 134201, B08B 302

Patent

active

053017005

ABSTRACT:
A washing system comprising a wafer washing section having plural chemical washing vessels, plural water washing vessels and a drier, a cassette washing section having a water washing device and a drier, a loader section for taking out the wafers from the cassettes and loading the wafers into the wafer washing section, an unloader section for returning the washed wafers in the washed cassette and unloading the wafers from the wafer washing section, a wafer transfer device the wafers in the wafer washing section, a cassette lifter for carrying the cassettes from the loader section to the cassette washing section, and a wire drive unit for carrying the cassettes in the cassette washing section.

REFERENCES:
patent: 4437479 (1984-03-01), Bardina
patent: 4941489 (1990-07-01), Kamimura et al.
Patent Abstracts of Japan, Apr. 7, 1992, Y. Kushima, "Cover Mechanism for Movable Zone."

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