Washing method using pure water

Details Washing method using pure water Washing method using pure water

1996-11-26

1999-02-09

Morgan, Kriellion S.

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

134 34, 134 36, B08B 300

Patent

active

058688641

ABSTRACT:
A method for washing an object, such as an optical element, includes the steps of dipping the object to be washed in a heated liquid and taking the object to washed from the heated liquid used in the dipping process, wherein the resistivity of the heated liquid is 0.5 to 5.0M.OMEGA..multidot.cm. In one embodiment, the heated liquid is pure water having a resistivity of 0.5M.OMEGA..multidot.cm, and the temperature of the pure water is 40.degree. C., and the pure water has a 0.3 .mu.m diameter particle count of not greater than 100 particles/ml.

REFERENCES:
patent: 5250117 (1993-10-01), Hirano et al.
patent: 5334258 (1994-08-01), Osano et al.

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