Washing installation including plural washers

Details Washing installation including plural washers Washing installation including plural washers

1998-04-01

2000-06-27

Snider, Theresa T.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 883, 15102, 151035, A47L 2500

Patent

active

060790733

ABSTRACT:
A roll type washer is a primary washer and includes a roll type washing member which rotates in contact with the surface of a semiconductor wafer, and a rotary driving member which rotates the semiconductor wafer. A secondary washer is a pad type washer including a pad washing mechanism which rotates and pivots over the semiconductor surface while in contact with the surface, and a rotary member which rotates the semiconductor wafer.

REFERENCES:
patent: 5475889 (1995-12-01), Thrasher et al.
patent: 5498294 (1996-03-01), Matsushita et al.
patent: 5518542 (1996-05-01), Matsukawa et al.
patent: 5581837 (1996-12-01), Uchiyama et al.
patent: 5655954 (1997-08-01), Oishi et al.
patent: 5675856 (1997-10-01), Itzkowitz
patent: 5701627 (1997-12-01), Matsumura et al.
patent: 5745945 (1998-05-01), Manfredi et al.
patent: 5860181 (1999-01-01), Maekawa et al.
patent: 5868866 (1999-02-01), Maekawa et al.

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