Cleaning and liquid contact with solids – Apparatus – With spray or jet supplying and/or applying means
Patent
1995-11-20
1997-09-30
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With spray or jet supplying and/or applying means
134902, B08B 1500
Patent
active
056717644
ABSTRACT:
Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
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Anai Noriyuki
Harada Koji
Izumi Sinichiro
Kamikawa Yuuji
Murakami Shinya
Stinson Frankie L.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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