Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1992-05-07
1996-02-06
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
1341022, 134155, 134186, 134181, 134902, 118326, B08B 302
Patent
active
054889642
ABSTRACT:
Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
REFERENCES:
patent: 4092176 (1978-05-01), Kozai et al.
patent: 4564280 (1986-01-01), Fukuda
patent: 4817652 (1989-04-01), Liu et al.
patent: 5000795 (1991-03-01), Chung et al.
patent: 5014727 (1991-05-01), Aigo
patent: 5069235 (1991-12-01), Vetter et al.
Anai Noriyuki
Harada Koji
Izumi Sinichiro
Kamikawa Yuji
Murakami Shinya
Stinson Frankie L.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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