Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Patent
1996-11-05
1999-03-30
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With plural means for supplying or applying different fluids...
134184, 134186, 134902, B08B 304
Patent
active
058876049
ABSTRACT:
Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
REFERENCES:
patent: 4671206 (1987-06-01), Hoppestad et al.
patent: 4753258 (1988-06-01), Seiichiro
patent: 5000208 (1991-03-01), Ludwig et al.
patent: 5014727 (1991-05-01), Aigo
patent: 5071488 (1991-12-01), Takayama et al.
IBM Technical Disclosure Bulletin, vol. 8, No. 12, May 1966.
Anai Noriyuki
Harada Koji
Izumi Sinichiro
Kamikawa Yuuji
Murakami Shinya
Stinson Frankie L.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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