Washing apparatus and washing method

Details Washing apparatus and washing method Washing apparatus and washing method

1997-08-11

1999-08-10

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Combining of separately supplied fluids

2894165, 2894175, 2894345, 1341021, 134153, 134902, 261115, A62C 500

Patent

active

059345667

ABSTRACT:
The present invention is directed to providing an apparatus which is improved so as to remove a contamination on a substrate efficiently. This apparatus includes a jet nozzle jetting out droplets toward a substrate. A liquid supply device and a gas supply device are connected to the jet nozzle. A mixing device mixing a liquid and a gas supplied to the jet nozzle and changing the liquid into the droplets is provided in the jet nozzle.

REFERENCES:
patent: 3050262 (1962-08-01), Curtis
patent: 4787404 (1988-11-01), Klosterman et al.
patent: 4809911 (1989-03-01), Ryan
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5456758 (1995-10-01), Menon
patent: 5555902 (1996-09-01), Menon

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