Washing apparatus

Details Washing apparatus Washing apparatus

1992-04-02

1993-11-16

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

1341041, 134902, B08B 302, B08B 304, B08B 1300

Patent

active

052614310

ABSTRACT:
A washing apparatus includes plural washing vessels each containing a solution for cleaning or washing wafers, a boat housed in each washing vessel to support the wafers and immersed together with the wafers in the chemical solution, and a carrier for carrying the wafers into and out of its corresponding washing vessel. The carrier has a fork for supporting the wafers and loading and unloading them to and from the boat. It further has nozzles for washing and drying the fork.

REFERENCES:
patent: 4282825 (1981-08-01), Nagatomo et al.
patent: 4924890 (1990-05-01), Giles et al.
patent: 4936328 (1990-06-01), Yatabe
patent: 4974619 (1990-12-01), Yu
patent: 5177514 (1993-01-01), Ushijima et al.

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