Wafers transfer device

Details Wafers transfer device Wafers transfer device

1991-01-22

1992-06-30

Skaggs, H. Grant

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414417, B65B 2102

Patent

active

051257840

ABSTRACT:
A wafer transfer device which includes a lifter system for lifting wafers seated in a cassette, a chuck system having at least two pairs of chuck members on each of which a plurality of grooves for holding the wafers therein are formed and serving to hold the wafers, which are lifted by the lifter system, between these chuck members, and a carrier system for carrying the wafers together with the chuck system. The wafer holding grooves on one of the paired chuck members are in series with those on one of the other paired chuck members, and the wafer holding grooves on one of the paired chuck members are parallel to those on one of the other paired chuck members.

REFERENCES:
patent: 4466766 (1984-08-01), Geren et al.
patent: 4536122 (1985-08-01), Herrmann et al.
patent: 4566;839 (1986-01-01), Butler
patent: 4568234 (1986-02-01), Lee et al.
patent: 4573851 (1986-03-01), Butler
patent: 4611966 (1986-09-01), Johnson
patent: 4695217 (1987-09-01), Lau
patent: 4699556 (1987-10-01), Foulke
patent: 4856957 (1989-08-01), Lau et al.

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