Wafer wet processing device

Details Wafer wet processing device Wafer wet processing device

1997-02-21

1998-12-08

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134186, 134902, B08B 304

Patent

active

058456635

ABSTRACT:
A wafer wet processing device which comprises a processing container containing side walls; means for introducing a processing solution to the lower portion of said container; means for removing the processing solution from the upper portion of said container; and a wafer carrier containing side walls and being open at the top and bottom thereof, said wafer carrier being slidably disposed within said processing chamber, wherein at least the lower portion of the side walls of said processing container is contiguous with the lower portion of the side walls of said wafer carrier so that the entirety of the processing solution is introduced within the wafer carrier.

REFERENCES:
patent: 3923156 (1975-12-01), Wallestad
patent: 4899767 (1990-02-01), McConnell et al.
patent: 4949848 (1990-08-01), Kos
patent: 5014727 (1991-05-01), Aigo
patent: 5071776 (1991-12-01), Matsushita et al.
patent: 5275184 (1994-01-01), Nishizawa et al.
patent: 5383484 (1995-01-01), Thomas et al.

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