Wafer transposing device

Details Wafer transposing device Wafer transposing device

1988-12-21

1990-06-26

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

118500, 134 76, 134 82, B08B 304

Patent

active

049363280

ABSTRACT:
A wafer transporting device for transposing and transferring wafers charged in at least two first carriers to second carriers, including a wafer holding device provided with a holder for holding the wafers which are removed from the first carriers and a wafer transferring device for removing the wafers charged in the first carriers by one stroke, thereby improving the working efficiency in a semiconductor manufacturing system.

REFERENCES:
patent: 3106927 (1963-10-01), Madwed
patent: 4282825 (1981-08-01), Nagatomo et al.
patent: 4715392 (1987-12-01), Abe et al.
patent: 4722752 (1988-02-01), Steck
patent: 4736758 (1988-04-01), Kusuhara
patent: 4736759 (1988-04-01), Coberly et al.
patent: 4777970 (1988-10-01), Kusuhara

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