Wafer transport system

Details Wafer transport system Wafer transport system

1983-05-23

1985-08-13

Siemens, Terrance L.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

414225, 414 82, 198775, B65G 2500

Patent

active

045346950

ABSTRACT:
A transport apparatus (10) for moving semiconductor wafers (12) between a cassette (15) and a process station (16), and from the process station to another cassette (17). A horizontally movable input shuttle (20) has three wafer holding elements (30, 32, 34) formed thereon. In a first position of the shuttle the second and third holding elements overly a pair of vertically movable lift plates (60), and in a second position of the shuttle the first and second holding elements overly the lift plates. A lifting mechanism (28) at the process station lifts wafers off the input shuttle when the shuttle is in its second position and deposits them on an output shuttle (22) which is essentially identical to the input shuttle. Wafers are lifted off the holding elements by the lift plates whenever the shuttle reaches either position, after which the lift plates replace the wafers on the shuttle and the shuttle is again moved. In this manner, a succession of wafers are moved stepwise from one cassette to the process station, and then to the other cassette. In accordance with one aspect of the invention the shuttle and the lift plates undergo harmonic motion to minimize relative motion between the wafers and the shuttle and lift members due to inertia.

REFERENCES:
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 3834213 (1974-09-01), Henzler et al.
patent: 3921788 (1975-11-01), Roberson, Jr. et al.
patent: 3973665 (1976-08-01), Giammanco
patent: 4361413 (1982-11-01), Toda
patent: 4432692 (1984-02-01), Breneman

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