Wafer transport system

Details Wafer transport system Wafer transport system

1984-07-24

1985-05-21

Valenza, Joseph E.

Conveyors: power-driven

Conveyor section

Reciprocating conveying surface

198619, B65G 2500

Patent

active

045180784

ABSTRACT:
A wafer transport system for use in in-line sputtering systems having a first magnet exterior to a process chamber and a second magnet in the process chamber connected to wafer support arms carrying wafers such that the magnetic coupling between the magnets permits the positioning of the wafer support arms in a desired location by movement of the exterior magnet.

REFERENCES:
patent: 2609915 (1952-09-01), Burgh
patent: 2997979 (1961-08-01), Tassara
patent: 3202406 (1965-08-01), Tack
patent: 3704775 (1972-12-01), Eickenhorst
patent: 3782561 (1974-01-01), Orii
patent: 3973665 (1976-08-01), Giammanco
patent: 4042093 (1977-08-01), Fujii et al.
patent: 4273507 (1981-06-01), Herdzina et al.
"Air Powered Linear Transporter Uses Rare-Earth Magnets", Feb. 1978, Engineering Materials and Design (Great Britain), vol. 22, No. 2.

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