Wafer transport apparatus

Details Wafer transport apparatus Wafer transport apparatus

2005-11-29

2005-11-29

Keenan, James W. (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S744500, C414S744600, C901S019000

Reexamination Certificate

active

06969227

ABSTRACT:
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

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Patent Abstract for 1-64232

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