Wafer transport apparatus

Details Wafer transport apparatus Wafer transport apparatus

2005-04-12

2005-04-12

Keenan, James W. (Department: 3652)

Material or article handling

Process

Of moving material between zones having different pressures...

C414S217000, C414S744300, C414S939000

Reexamination Certificate

active

06877946

ABSTRACT:
A loadlock chamber assembly includes a loadlock chamber, a sub-chamber removably attached to the loadlock chamber and a first robot arm having a primary pivot axis within the sub-chamber, wherein the first robot arm can move a substrate from a position approximately in a center of the loadlock chamber to a position outside the loadlock chamber.

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Patent Abstract for 1-64232.

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