Wafer transforming device

Details Wafer transforming device Wafer transforming device

1982-10-14

1985-03-12

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

269 22, B25B 1100

Patent

active

045040451

ABSTRACT:
A wafer transforming device defines an airtight space by means of a base, a hollow case, and a diaphragm type chuck which is fixed to the upper end of the case by suction. In this space, a large number of vertically moving elements are arranged at predetermined intervals. In the state in which a wafer is held by suction by means of the chuck and in which the chuck is held in contact with the upper ends of the vertically moving elements by supplying a vacuum pressure into the space, the vertically moving elements located within a required range are selectively actuated. Thus, the chuck is pushed up, and the wafer held on the chuck by the suction is transformed into a desired state.

REFERENCES:
patent: 3955163 (1976-05-01), Novak
patent: 4391511 (1983-07-01), Akiyama et al.
patent: 4410168 (1983-10-01), Gotman
patent: 4428815 (1984-01-01), Powell et al.
IBM Technical Disclosure Bulletin, vol. 15, No. 10, Mar. 1973, "Flatness Controlled Wafer Clamping Pedestal".

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