Wafer transferring device

Details Wafer transferring device Wafer transferring device

1987-10-08

1989-07-11

Werner, Frank E.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

1983391, 1984686, B65H 300

Patent

active

048466239

ABSTRACT:
A wafer transferring device for transferring a wafer to be treated from a wafer supply station of a wafer treating apparatus to a wafer holding member, where the wafer is treated, and from the holding member to a wafer discharge station. The device includes a transfer unit for separately supporting untreated and treated wafers at different heights relative to one another. A carrier unit moves horizontally and reciprocates between the supply and discharge stations and toward and away from the holding member integrally with the transfer unit and is adapted to move up and down the transfer unit.

REFERENCES:
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4648786 (1987-03-01), Sakurai
patent: 4712963 (1987-12-01), Kondo

Affiliated with

Also associated with

Rating

Wafer transferring device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transferring device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transferring device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-432940