Wafer transferring chuck assembly

Details Wafer transferring chuck assembly Wafer transferring chuck assembly

1983-06-15

1985-07-23

Spar, Robert J.

Material or article handling

Elevator or hoist and loading or unloading means therefor

Grab

294 641, 269 21, B65H 308

Patent

active

045306354

ABSTRACT:
A wafer chuck assembly having an elevator for accepting a wafer and placing it precisely on a platen without changing its spatial orientation.

REFERENCES:
patent: 1062579 (1913-05-01), Aylsworth
patent: 3089600 (1963-05-01), Fischer, Jr.
patent: 3957263 (1976-05-01), Christl
patent: 4006929 (1977-02-01), Barker
patent: 4078671 (1978-03-01), Lundstrom
patent: 4278348 (1981-07-01), Funk et al.
patent: 4448403 (1984-05-01), Riessland et al.

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