Wafer transfer system

Details Wafer transfer system Wafer transfer system

1991-04-26

1993-02-23

Huppert, Michael S.

Material or article handling

Device for emptying portable receptacle

Nongravity type

118503, 118728, 414DIG7, 414225, B65H 322

Patent

active

051885018

ABSTRACT:
A wafer transfer system consisting of automatic robot claws and a susceptor having circularly bounded and round-bottomed concavities for receiving wafers, wherein the concavities of the susceptor are each provided with at least three trenches made across the circumference of each concavity and arranged equiangularly about the center of each concavity; that each trench is formed such that when a wafer is set in the concavity that portion of the edge of the wafer which is disposed in the trench defines under itself a space in communication with the rest of the space defined by the trench; and that the automatic claws each have as many nails as the number of the trenches of each concavity and are capable of opening and closing the nails which are designed to engage with the wafer in the concavity by inserting the nail tips into the respective space defined under the edge of the wafer.

REFERENCES:
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3764511 (1973-10-01), Glick et al.
patent: 4132311 (1979-01-01), Glinert
patent: 4208006 (1980-06-01), Bixler et al.
patent: 4986215 (1991-01-01), Yamada et al.
patent: 5052560 (1991-10-01), Stringham
"Article Handling Apparatus", Metreaud, IBM Technical Disclosure Bulletin, vol. 9 No. 5, pp. 548-549, Oct. 1966.

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