Wafer transfer system

Details Wafer transfer system Wafer transfer system

1982-05-24

1984-05-22

Valenza, Joseph E.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

414417, 198345, B65G 100

Patent

active

044498853

ABSTRACT:
A system for the automated transfer of semiconductor wafers between a cassette and a wafer processing chamber. Included in the system are a cassette conveyor assembly, a wafer transfer assembly and a wafer handling assembly associated with the entrance to the processing chamber. Wafers of any standard size can be accommodated by the system. The cassette conveyor assembly includes a cassette holder which retains and precisely positions two standard plastic cassettes. The cassette holder is positioned by a ball reverser driven by a motor and a mechanical stepper. The wafer transfer assembly includes an elevator blade which vertically raises and lowers wafers to and from the wafer handling assembly. The elevator blade is actuated by a crank driven by a motor and a mechanical stepper. The crank provides a high rate of wafer transfer and a low risk of wafer damage.

REFERENCES:
patent: 3730595 (1973-05-01), Yakubowski
patent: 4030622 (1977-06-01), Brooks et al.
patent: 4108323 (1978-08-01), Shambelan et al.
patent: 4311427 (1982-01-01), Coad et al.
patent: 4367915 (1983-01-01), Georges

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