Material or article handling – Apparatus for charging a load holding or supporting element... – Load holding or supporting element including gripping means
Patent
1987-12-21
1989-06-06
Spar, Robert J.
Material or article handling
Apparatus for charging a load holding or supporting element...
Load holding or supporting element including gripping means
29720, 414416, 414331, 198341, 1984642, B65H 508
Patent
active
048367338
ABSTRACT:
Wafer transfer apparatus for horizontal transfer of a wafer between a cassette and an input station of a vacuum processing system includes a wafer transfer arm with a primary section linked to a secondary section so as to move a wafer in a straight line to a location and orientation station and then to the input station. The actual location of the wafer center and the angular orientation of the wafer flat are determined, and the wafer is rotated to a desired angular orientation at the location and orientation station. A solar cell is used to sense actual wafer position by sensing the wafer edge as it is rotated. The required correction and rotation are calculated from the solar cell output. As the wafer is transferred to the input station, correcting displacements are added to the movement so that the wafer is accurately positioned at the input station. A strain gauge is used to reliably sense wafer presence or absence on the transfer arm.
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IBM Technical Disclosure Bulletin, vol. 18, No. 11, Apr. 1976.
Bhargava Akhil
Delforge Adrian C.
Hertel Richard J.
Jennings Robert E.
MacIntosh Edward D.
Cole Stanley Z.
Dooher Terrence E.
Spar Robert J.
Underwood Donald W.
Varian Associates Inc.
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