Wafer transfer stand

Details Wafer transfer stand Wafer transfer stand

1987-05-12

1988-01-26

Spar, Robert J.

Material or article handling

Device for emptying portable receptacle

With jarring means

414416, 211 41, 211194, B65G 6530

Patent

active

047214279

ABSTRACT:
Empty wafer cassettes are stored on a transfer stand having one or more storage locations on a post which extends below a wafer comb while the wafers are being processed. Each storage location generally has a cross bar with spaced upward projections for receiving the leg of a cassette.

REFERENCES:
patent: 4471716 (1984-09-01), Milliren
patent: 4490087 (1984-12-01), Ryan et al.
patent: 4566839 (1986-01-01), Butler
patent: 4568234 (1986-02-01), Lee et al.
patent: 4569624 (1986-02-01), Noda et al.
patent: 4611966 (1986-09-01), Johnson
patent: 4653650 (1987-03-01), Schulke
patent: 4695217 (1987-09-01), Lau

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