Wafer transfer plate

Details Wafer transfer plate Wafer transfer plate

1995-11-13

1997-09-23

Kramer, Dean

Handling: hand and hoist-line implements

Contact lens applicator

294902, 414941, B25J 1500

Patent

active

056696442

ABSTRACT:
A wafer transfer plate adapted to be disposed on a wafer transfer unit for transferring a wafer within a wafer manufacturing system, which comprises at least one wafer contact portion designed to be held in contact with the wafer as the wafer transfer plate is loaded with the wafer, a coated film being formed of a material which does not contain harmful elements and provided at a region including the wafer contact portion.

REFERENCES:
patent: 3539216 (1970-11-01), Forcier
patent: 4410209 (1983-10-01), Trapani
patent: 4639028 (1987-01-01), Olson
patent: 5061144 (1991-10-01), Akimoto et al.
patent: 5188501 (1993-02-01), Tomita et al.
patent: 5280979 (1994-01-01), Poli et al.
patent: 5406695 (1995-04-01), Amemori
IBM Technical Disclosure Bulletin, vol. 19, No. 3 Aug. 1976.

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