Wafer transfer machine

Details Wafer transfer machine Wafer transfer machine

1992-04-16

1994-04-05

Huppert, Michael S.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414225, 414417, 414938, B65G 4907

Patent

active

052999017

ABSTRACT:
The plate-shaped part (wafer) transfer machine of this invention consists of a rotatable turntable that supports the carrier; carrier pressers that are set on the turntable and are used to fix the carrier; a lifter which can move vertically with a wafer in the carrier or boat supported on it; and a guide which guides the wafer when the lifter performs vertical movement (the role of the guide is played by the wafer presser used for fixing the wafer in the carrier).

REFERENCES:
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patent: 4509892 (1985-04-01), Redeker et al.
patent: 4550242 (1985-10-01), Uehara et al.
patent: 4744715 (1988-05-01), Kawabata
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4806057 (1989-02-01), Cay et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4867629 (1989-09-01), Iwasawa et al.
patent: 4938655 (1990-07-01), Asano
patent: 4947784 (1990-08-01), Nishi
patent: 4952115 (1990-08-01), Ohkase
patent: 4986729 (1991-01-01), Ohlenbusch
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5058526 (1991-10-01), Matsushita et al.

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