Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
2007-02-06
2007-02-06
Brahan, Thomas J (Department: 3654)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S811000
Reexamination Certificate
active
10873301
ABSTRACT:
A semiconductor wafer transfer equipment transfers a plurality of semiconductor wafers, held in grooves of carriers in an erected state, to a boat using first and second wafer elevators equipped with a comb-teeth portion and a wafer grip and transfer unit. The first and second wafer elevators correspond to the carriers and the boat and are equipped with a position correction mechanism which corrects positions of comb-teeth openings of comb-teeth members provided on the comb-teeth portion, corresponding to semiconductor wafers housed in the grooves of the carriers.
REFERENCES:
patent: 4611966 (1986-09-01), Johnson
patent: 4987407 (1991-01-01), Lee
patent: 5188499 (1993-02-01), Tarng et al.
patent: 5193969 (1993-03-01), Rush et al.
patent: 5370142 (1994-12-01), Nishi et al.
patent: 5620295 (1997-04-01), Nishi
patent: 5692869 (1997-12-01), Kumagai
patent: 5887604 (1999-03-01), Murakami et al.
patent: 6053694 (2000-04-01), Dill
patent: 6193459 (2001-02-01), Rush
patent: 6769855 (2004-08-01), Yokomori et al.
patent: 2001-168172 (2001-06-01), None
patent: 3260160 (2001-12-01), None
patent: 2002-19814 (2002-07-01), None
Fujii Koji
Takeuchi Tomoaki
Brahan Thomas J
Kabushiki Kaisha Toshiba
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