Wafer transfer equipment and semiconductor device...

Material or article handling – Device for emptying portable receptacle – Nongravity type

Reexamination Certificate

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Details

C414S811000

Reexamination Certificate

active

10873301

ABSTRACT:
A semiconductor wafer transfer equipment transfers a plurality of semiconductor wafers, held in grooves of carriers in an erected state, to a boat using first and second wafer elevators equipped with a comb-teeth portion and a wafer grip and transfer unit. The first and second wafer elevators correspond to the carriers and the boat and are equipped with a position correction mechanism which corrects positions of comb-teeth openings of comb-teeth members provided on the comb-teeth portion, corresponding to semiconductor wafers housed in the grooves of the carriers.

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patent: 2001-168172 (2001-06-01), None
patent: 3260160 (2001-12-01), None
patent: 2002-19814 (2002-07-01), None

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