Wafer transfer device

Details Wafer transfer device Wafer transfer device

1975-12-29

1978-07-25

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

198394, 214 1BB, 214 6F, G01R 3122, B65G 4724

Patent

active

041032322

ABSTRACT:
A device to facilitate electrical measurement, including step-and-repeat measurement of minute circuits on a semiconductor wafer by placing the wafer in a specific, angular and cartesian coordinate position with respect to a certain orientation of a disc-like pallet of somewhat larger diameter than the wafer. The apparatus includes a stack of available pallets, each having an indexing portion, arms to engage the pallet in turn and to interfit with the indexing portion, a translational motion device to move the arms and pallet to another specific location to receive the wafer, a controllable section device to hold the wafer and to rotate it about a vertical axis, and a further controlled guide device to move the arms and wafer in specific X and Y directions to a predetermined orientation. The device includes a connection between each pallet and an evacuating apparatus to affix the wafer to the pallet by suction when the wafer is released from the suction device on the orienting structure. The apparatus further includes a receiving structure to receive pallets with wafers affixed thereto. In addition, the pallets and wafers are subsequently moved from a stack of untested wafers to testing apparatus that includes probes arranged to engage specific minute areas on the wafers. One of the probes includes electrical contact means to be energized by engagement with the surface of the wafer and to control additional movement of the probes toward the surface to a specific amount to exert a predetermined pressure by the probes on the wafer. After testing, the pallets with tested wafers are moved to a location set aside therefore.

REFERENCES:
patent: 3437929 (1969-04-01), Glenn
patent: 4024963 (1977-05-01), Hautau
Welch Catalog; 1968; Sargent-Welch Scientific Co., Skokie, Ill.; p. 640.

Affiliated with

Also associated with

Rating

Wafer transfer device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transfer device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transfer device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1424020