Wafer transfer arm mechanism

Details Wafer transfer arm mechanism Wafer transfer arm mechanism

1986-01-08

1988-04-26

Spar, Robert J.

Material or article handling

Load carried along a horizontal linear path

Carried via magnetic floating

108 20, 1984686, B65G 700

Patent

active

047401354

ABSTRACT:
A transfer arm mechanism including a base assembly, a pivoting arm extending generally upwardly from the base assembly, a wafer support paddle, and mechanisms for pivoting the arm back and forth while maintaining the wafer support paddle in a horizontal plane. A base assembly includes a rotatable plate which can rotate the mechanism through 360.degree., and a support plate which can be moved up and down along guide posts attached to the rotatable plate. The mechanism for moving the wafer paddle along a horizontal plane includes a cam member attached to the support plate, and a cam follower which rolls along an upper surface of the cam member to compensate for the pivoting action of the arm assembly. A mechanism is also provided to prevent the wafer paddle from tipping which includes a drive chain extending between a gear which is rotationally fixed with respect to the support plate and a gear which is attached to a pivot pin supporting the wafer paddle.

REFERENCES:
patent: 2948417 (1960-08-01), Haanes
patent: 3317004 (1967-05-01), Harrison et al.
patent: 3823836 (1974-07-01), Cheney et al.
patent: 4108323 (1978-08-01), Shambelan et al.
patent: 4365561 (1982-12-01), Tellier et al.
patent: 4382743 (1983-05-01), Newell
patent: 4393920 (1983-07-01), Shima et al.
patent: 4427332 (1984-01-01), Manriquez
patent: 4457661 (1984-07-01), Flint et al.
patent: 4501527 (1985-02-01), Jacoby et al.
patent: 4584896 (1986-04-01), Letovsky
Fegley, C. Abraham, "Automatic Wafer Transfer and Turnover Tool" Western Electric Technical Digest, Jan. 1978, No. 49.

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