Wafer transfer apparatus having an improved wafer transfer porti

Details Wafer transfer apparatus having an improved wafer transfer porti Wafer transfer apparatus having an improved wafer transfer porti

1988-11-22

1990-05-08

Bucci, David A.

Elevator, industrial lift truck, or stationary lift for vehicle

Stationary lift for roadway vehicle or required component...

Having specific drive means for support

414331, 414609, B65G 107

Patent

active

049230549

ABSTRACT:
An apparatus for storing and transferring a wafer. The apparatus includes a wafer transfer portion having a path through which a wafer can be transferred; structure for storing the wafer, the structure for storing the wafer being removably attached to the wafer transfer portion; a first elevator for elevating and lowering the wafer transfer portion and the storing structure to a predetermined level; a holder for temporarily holding the wafer in the wafer transfer portion; and a second elevator for elevating and lowering the wafer holder, the second elevator being separate and independent from the first elevator. Since the wafer storing structure and the wafer transfer portion are elevated and lowered by different elevators, the wafer can be transported while the wafer transfer portion is stationary. Thus, the apparatus has a simplified construction and replacement of the storing structure can be automated.

REFERENCES:
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4818169 (1989-04-01), Schram et al.

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