Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1991-01-04

1992-06-30

Bucci, David A.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

414590, 901 6, 901 17, B65G 6500

Patent

active

051257904

ABSTRACT:
Apparatus for inserting a semiconductor wafer in a slot of a holding post including a wafer support member or paddle for supporting the wafer and inserting it into a slot and rotation device for rotating the support member by the angle necessary to cause edges of the wafer to be received at the centers of the slots.

REFERENCES:
patent: 3095982 (1963-07-01), Weiser
patent: 3503527 (1970-03-01), Devol
patent: 3848444 (1974-11-01), Baugh et al.
patent: 4019668 (1977-04-01), Diepeveen
patent: 4242025 (1980-12-01), Thibault
patent: 4312618 (1982-01-01), Greene
patent: 4502830 (1985-03-01), Inaba et al.
patent: 4507044 (1985-03-01), Hutchins et al.
patent: 4515508 (1985-05-01), Takamatsu
Semiconductor Production, Autumn 1980, New Automatic Wafer Handling Equipment for Semi Standard Plastic Carriers, Guy Mongodin.

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