Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1994-10-13

1997-01-07

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

294 871, 2941031, 414937, 414941, B65G 6500

Patent

active

055909965

ABSTRACT:
A wafer transfer apparatus capable of simultaneously transferring multiple semiconductor wafers to and from a furnace or similar columnar wafer station. The apparatus has a cantilevered extension which extends from a main part. The extension is preferably mounted for pivotal movement. The extension has a distal engagement head mounted thereon. The distal engagement head is moved between a lateral position and an upstanding engaging position. The engagement head has a plurality of wafer support features which support the far edges of a group of wafers. The near edges of the wafers are held by proximal wafer contact heads.

REFERENCES:
patent: 4813732 (1989-03-01), Klem
patent: 4875824 (1989-10-01), Moe et al.
patent: 4900214 (1990-02-01), Ben
patent: 5022695 (1991-06-01), Ayers
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5133635 (1992-07-01), Malin et al.
patent: 5404894 (1995-04-01), Shiraiwa

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