Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1990-01-29

1991-01-22

Bucci, David A.

Material or article handling

Miscellaneous

414404, 414416, 414730, 414732, 414737, B65G 6502

Patent

active

049867296

ABSTRACT:
Apparatus for placing a first element at a location on a second element, there being associated with the location some known variation in the shape of the second element, the apparatus including a support member for supporting the first element while the member is translated toward the second element along a placement direction, a transporter for moving the support member or the second element along a transport direction transverse to the placement direction, a sensor for sensing the relative alignment of the support member with the known variation in shape along the transport direction, the sensor including a scanning element that is detachably engageable by the support member, and a holder for storing the scanning element when the scanning element is not in use.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4699556 (1987-10-01), Foulke
patent: 4708582 (1987-11-01), Hamada et al.

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