Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

2005-02-25

2009-11-03

Chin, Paul T (Department: 3652)

Handling: hand and hoist-line implements

Grapple

Fixed and moveable jaw

C414S941000

Reexamination Certificate

active

07611182

ABSTRACT:
A wafer transfer apparatus may include a robot arm unit configured to be operated by a driving means, a blade configured to support a wafer and having a fix finger at a first end, and a clamping member attached to the robot arm. The clamping arm may also include a movable finger configured to hold a peripheral edge of the wafer, and a moving pusher attached to the movable finger and configured to guide the movable finger and the wafer on the blade towards the fix finger.

REFERENCES:
patent: 5133635 (1992-07-01), Malin et al.
patent: 5810935 (1998-09-01), Lee et al.
patent: 6216883 (2001-04-01), Kobayashi et al.
patent: 6256555 (2001-07-01), Bacchi et al.
patent: 6623235 (2003-09-01), Yokota et al.
patent: 6769861 (2004-08-01), Caveney
patent: 6913302 (2005-07-01), Yokota et al.
patent: 7140655 (2006-11-01), Kesil et al.
patent: 2002/0042666 (2002-04-01), Bacchi et al.
patent: 2005/0017529 (2005-01-01), Rogers et al.
patent: 2007/0216179 (2007-09-01), Hirooka et al.
patent: 2361843 (2000-02-01), None
patent: 1336008 (2002-02-01), None
patent: 63-144984 (1986-12-01), None
patent: 1995-71510 (1995-03-01), None
patent: 11-354605 (1999-12-01), None
patent: 2000-012656 (2000-01-01), None
patent: 2000-077494 (2000-03-01), None
patent: 2000-133692 (2000-05-01), None
patent: 2000-343475 (2000-12-01), None
patent: 2002-141395 (2002-05-01), None
patent: 2002-184853 (2002-06-01), None
patent: 2002-252268 (2002-09-01), None
patent: 2002-264065 (2002-09-01), None
patent: 1020030097286 (2003-12-01), None
patent: 2004-006534 (2004-01-01), None
patent: 2004-119554 (2004-04-01), None
patent: 10-2000-0016059 (2000-03-01), None
patent: 1020010006901 (2001-01-01), None
patent: 10-2002-0034587 (2002-06-01), None

Affiliated with

Also associated with

Rating

Wafer transfer apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transfer apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transfer apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4101591