Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1984-11-02

1987-07-28

Paperner, L. J.

Material or article handling

Device for emptying portable receptacle

Nongravity type

294 641, 294907, 414730, 414737, 269 21, B65G 6500

Patent

active

046829288

ABSTRACT:
Wafer transfer apparatus including a wafer-pickup element having suction openings closer to the edge of wafer than the wafer's center so that the wafer can be picked up with greater certainty as to the locations of the wafer edges, the pickup element being thin and made of a structural layer of rigid structural material having grooves and a TEFLON layer laminated to the structural layer and having suction openings, the grooves and covering portions of TEFLON defining vacuum passages.

REFERENCES:
patent: 3227481 (1966-01-01), Creskoff
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3517958 (1970-06-01), Boucher et al.
patent: 3881605 (1975-05-01), Grossman
patent: 3902615 (1975-09-01), Levy et al.
patent: 4002254 (1977-01-01), Olofsen
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4266905 (1981-05-01), Birk et al.
patent: 4603897 (1986-08-01), Foulke et al.
Semiconductor Production, Autumn 1980, New Automatic Wafer Handling Equipment for Semi Standard Plastic Carriers, Guy Mongodin, pp. 31, 33 and 34.

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