Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1990-01-29

1991-01-08

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

294 641, 414627, 414786, B65G 6502

Patent

active

049830937

ABSTRACT:
Wafer transfer apparatus including a wafer-pickup element having suction openings closer to the edge of wafer than the wafer's center so that the wafer can be picked up with greater certainty as to the locations of the wafer edges, the openings being surrounded by raised portions so that the region of the wafer-pickup element between the opening is at a lower elevation than the raised portions so as to facilitate picking up warped wafers.

REFERENCES:
patent: 2366935 (1945-01-01), Schmid
patent: 2941675 (1960-06-01), Noble et al.
patent: 3227481 (1966-01-01), Creskoff
patent: 3272350 (1966-09-01), Pflaumer et al.
patent: 3645581 (1972-02-01), Lasch, Jr. et al.
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4682928 (1987-07-01), Foulke et al.
Wafer Transfer System-T. Kehagiouglou, IBM Technical Disclosure Bulletin, vol. 18, No. 11, Apr. 1976.

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