Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1996-03-07

1996-11-19

Bucci, David A.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

B65G 6500

Patent

active

055756115

ABSTRACT:
A wafer transfer apparatus capable of simultaneously transferring multiple semiconductor wafers to and from a furnace or similar columnar wafer station. The apparatus has a cantilevered extension which extends from a main part. The extension is preferably mounted for pivotal movement. The extension has a distal engagement head mounted thereon. The distal engagement head is moved between a lateral position and an upstanding engaging position. The engagement head has a plurality of wafer support features which support the far edges of a group of wafers. The near edges of the wafers are held by proximal wafer contact heads.

REFERENCES:
patent: 4813732 (1989-03-01), Klem
patent: 4875824 (1989-10-01), Moe et al.
patent: 4900214 (1990-02-01), Ben
patent: 5022695 (1991-06-01), Ayers
patent: 5054988 (1991-10-01), Shiraiwa
patent: 5133635 (1992-07-01), Malin et al.
patent: 5404894 (1995-04-01), Shiraiwa

Affiliated with

Also associated with

Rating

Wafer transfer apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer transfer apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer transfer apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-536212