Wafer tongs

Handling: hand and hoist-line implements – Detachable lifter – Resilient

Patent

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Details

81 43, 294 99R, B25B 902

Patent

active

040098990

ABSTRACT:
Wafer tongs for grasping semiconductor wafers and the like are provided with a pair of jaws and at least one wafer-contacting stop limiting the reach of the jaws onto the surface of a wafer from the wafer edge. The stops may take the form of jaw guides which extend from one jaw towards the other to maintain alignment of the jaws. In one embodiment, the guides are carried by a clip movably attached to one jaw for forward or rearward movement thereon to adjust the reach of the jaws onto a wafer. The forward ends of the jaws may be resilient so as to engage and flatten against surfaces of the wafer to improve the grip of the jaws and reduce wafer breakage.

REFERENCES:
patent: 3140715 (1964-07-01), Whittow et al.
patent: 3367336 (1968-02-01), Eizenberg
patent: 3496807 (1970-02-01), Jones et al.
patent: 3653389 (1972-04-01), Shannon
patent: 3665790 (1972-05-01), Jones
patent: 3741602 (1973-06-01), Ploeckelmann

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