Wafer testing system integrated with RFID techniques and...

Details Wafer testing system integrated with RFID techniques and... Wafer testing system integrated with RFID techniques and...

2008-04-03

2009-10-27

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C235S375000, C340S572100, C700S225000

Reexamination Certificate

active

07609053

ABSTRACT:
This invention provides a wafer testing system and testing method thereof. The wafer testing system comprises a wafer storage section, a prober, a tester, an RFID middleware unit, an EDA system and an MES system. The wafer storage section stores a multiplicity of carriers, each of which is provided with at least a RFID tag. The prober comprises a RFID reader to read a tag information. The tester sends a test signal to the prober for implementing the wafer test so as to generate a test result and calls an interface program to convert the test result into a file conformed with a specific data format. The RFID middleware unit receives the tag information and calls related applications to process the tag information so as to generate a wafer information. The EDA system receives the file of the specific data format converted from the interface program and calculates thereof to generate a wafer yield information after wafer test. The MES system integrates the wafer information from the RFID middleware unit with the yield information from the EDA system so as to allow monitoring the wafer manufacturing process and testing yield rate in a real-time manner.

REFERENCES:
patent: 6236223 (2001-05-01), Brady et al.
patent: 6330971 (2001-12-01), Mabry et al.
patent: 2006/0043197 (2006-03-01), Chang et al.
patent: 267029 (2006-11-01), None

Affiliated with

Also associated with

Rating

Wafer testing system integrated with RFID techniques and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer testing system integrated with RFID techniques and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer testing system integrated with RFID techniques and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4093062