Wafer test fixture using a biasing bladder and methodology

Details Wafer test fixture using a biasing bladder and methodology Wafer test fixture using a biasing bladder and methodology

1997-04-29

2000-11-14

Snow, Walter E.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324754, G01R 3102

Patent

active

061475068

ABSTRACT:
A wafer test and burn-in fixture and methodology including a wafer probe having flexible tabs and a load board coupled to the wafer probe using the flexible tabs. The fixture also includes a bladder which biases the wafer probe to contact a wafer. A temperature control apparatus is provided to control the temperature of the wafer probe and the wafer. Tests are performed on the wafer using built-in self tests or wrap wiring tests.

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