Wafer test equipment and method of aligning test equipment

Details Wafer test equipment and method of aligning test equipment Wafer test equipment and method of aligning test equipment

2007-05-15

2007-05-15

Tang, Minh N. (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S758010

Reexamination Certificate

active

11104337

ABSTRACT:
Wafer test equipment includes a probe station having a wafer chuck for supporting a wafer, a test head disposed on the probe station, a manipulator for moving the test head to and from an upper surface of the probe station, and an alignment monitoring member for monitoring an alignment of the test head docked to the probe station.

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Abstract of Korean Utility Application No. 20-1994-0036955 (Publication No. 1996-025399).

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