Wafer table preparing electrical components and device for...

Details Wafer table preparing electrical components and device for... Wafer table preparing electrical components and device for...

2011-03-29

2011-03-29

Phan, Thiem (Department: 3729)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S721000, C029S740000, C029S741000, C029S759000, C029S809000

Reexamination Certificate

active

07913380

ABSTRACT:
A wafer table for providing electrical components of a wafer includes a rotary disk to receive a wafer. The rotary disk is configured to be displaced parallel to a wafer plane in discrete steps such that the components arrive at a stationary pick-up position. A stationary auxiliary facility is assigned to the pick-up position, and a first rotary drive rotates the rotary disk. A carriage supports the rotary disk and is displaced in a stationary linear guide parallel to the wafer by means of a linear drive. The first rotary drive and the linear drive are positioned such that each of the components arrives at the pick-up position.

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