Wafer supporting and/or conveying apparatus

Details Wafer supporting and/or conveying apparatus Wafer supporting and/or conveying apparatus

1997-10-21

1999-06-22

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

206454, 118500, A47F 500

Patent

active

059134291

ABSTRACT:
A wafer supporting and/or conveying apparatus includes at least one supporter having a plurality of recesses into which the edge of a wafer is inserted, for supporting the wafer inserted into the recesses at the lower portion of the wafer; a first connection rod for connecting the supporter to an actuator; at least two holding rods having a plurality of recesses into which the edge of a wafer is inserted, for holding the wafer at the top of its both sides; and a second connection rod for connecting the holding rods to the actuator. A connecting board is set between the first connection rod and supporter, or between the second connection rod and supporter, thereby increasing stability in the apparatus.

REFERENCES:
patent: 3889815 (1975-06-01), Merle
patent: 4191295 (1980-03-01), Tams
patent: 4355974 (1982-10-01), Lee
patent: 4515104 (1985-05-01), Lee
patent: 4572101 (1986-02-01), Lee
patent: 4653636 (1987-03-01), Armstrong
patent: 4966549 (1990-10-01), Ohdate
patent: 5011041 (1991-04-01), Kakizaki
patent: 5292373 (1994-03-01), Arita et al.
patent: 5503173 (1996-04-01), Kudo et al.
patent: 5752609 (1998-05-01), Kato et al.

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