Wafer support device

Details Wafer support device Wafer support device

1989-02-24

1990-08-28

Bucci, David A.

Material or article handling

Elevator or hoist and loading or unloading means therefor

Grab

414404, 414416, 414417, B65G 6500

Patent

active

049521152

ABSTRACT:
A wafer support device including at least one support member shaped like a rotatable rod and having plural wafer support grooves formed at different pitches on the outer surface of the member in the longitudinal direction thereof. The frequencies of exchanging the support member with a new one or washing and cleaning it can be remarkably reduced and the productivity of semi-conductor wafers can be enhanced.

REFERENCES:
patent: 4244673 (1981-01-01), Henderson
patent: 4311427 (1982-01-01), Coad et al.
patent: 4493606 (1985-01-01), Foulke et al.
patent: 4568234 (1986-02-01), Lee et al.

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