Wafer supplying apparatus

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – Presses or press platen structures – per se

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Details

29413, 294266, 156344, 225103, B32B 3118

Patent

active

049369440

ABSTRACT:
A wafer supplying apparatus including a supply ring to which a wafer sheet having semiconductor pellets adhered thereto is attached, a ring holder provided on an X-Y table of a pellet pick-up device, the ring holder supporting and placing the wafer sheet onto the upper surface of a cylindrical portion of the ring holder having an external diameter smaller than the internal diameter of the supply ring, a pressing ring provided above the supply ring, a pusher which pushes down the supply ring around the cylindrical portion of the ring holder through the pressing ring, and a fastener which fastens the pressing ring to the ring holder after the supply ring has been pushed down by the pusher.

REFERENCES:
patent: 3537603 (1970-11-01), Willis et al.

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