Coating apparatus – Work holders – or handling devices
Patent
1998-04-23
2000-04-18
Edwards, Laura
Coating apparatus
Work holders, or handling devices
269 21, 211 4118, B05C 1300, B25B 1100
Patent
active
060510676
ABSTRACT:
A wafer securing device and method for securing a planar plate on a wafer having a hollowed-out portion, the device including a substrate for receiving the wafer; a groove provided on the substrate and having an opening, the hollowed-out portion corresponding to the groove when the wafer is placed on the substrate; and an air extracting equipment for extracting air from the groove when the wafer is placed on the substrate so that the planar plate placed on the wafer is secured to the wafer by means of a vacuum suction force.
REFERENCES:
patent: 4131267 (1978-12-01), Ono et al.
patent: 4603466 (1986-08-01), Morley
patent: 5436693 (1995-07-01), Marumo
Chuang Bill Yuan Chung
Ho Jing Yuang
Mou Michael
Yang Arnold Chang Mou
Edwards Laura
Koch, III George R.
Microjet Technology Co., Ltd.
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