Wafer scrubbing machine

Details Wafer scrubbing machine Wafer scrubbing machine

1998-11-30

2000-05-02

Warden, Sr., Robert J.

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 211, 414938, A46B 1300, B65G 4907

Patent

active

060556943

ABSTRACT:
A wafer scrubbing machine is provided with a network of wafer holders which can be moved from a retracted position adjacent each other at a wafer receiving station to an expanded position spaced apart from each within a scrubbing station. The wafers are picked up simultaneously by pairs of depending arms in the scrubbing station and passed between pairs of rotating brushes for cleaning purposes. A common drive wheel is provided to rotate the wafers simultaneously during scrubbing between the brushes. A second network of wafer holders is provided to receive the scrubbed wafers in the scrubbing station and to move into a retracted position within a delivery station for transfer of the cleaned wafers into a cassette for subsequent processing. Two sets of networks may be provided on a common rotatable assembly in order to accommodate two different sizes of delivered wafers.

REFERENCES:
patent: 4138755 (1979-02-01), Hashimoto et al.
patent: 4202071 (1980-05-01), Scharpf
patent: 4208760 (1980-06-01), Dexter et al.
patent: 5092011 (1992-03-01), Gommori et al.

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