Wafer scrubbing device

Details Wafer scrubbing device Wafer scrubbing device

1996-06-14

1997-10-14

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 883, 15 884, 15102, B08B 302, B08B 1102

Patent

active

056758561

ABSTRACT:
A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the variable rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.

REFERENCES:
patent: 3809105 (1974-05-01), Horner
patent: 3939514 (1976-02-01), Cook
patent: 3970471 (1976-07-01), Bankes et al.
patent: 4101999 (1978-07-01), Doyel
patent: 4208760 (1980-06-01), Dexter et al.
patent: 4520470 (1985-05-01), d'Alayer de Costemore d'Arc
patent: 4556433 (1985-12-01), Clausen
patent: 4631773 (1986-12-01), Graham
patent: 4654917 (1987-04-01), Yeung
patent: 4715392 (1987-12-01), Abe et al.
patent: 4783870 (1988-11-01), Yeung
patent: 4811443 (1989-03-01), Nishizawa
patent: 5144711 (1992-09-01), Gill, Jr.
patent: 5146382 (1992-09-01), Yao-Ko
patent: 5282289 (1994-02-01), Hasegawa et al.
patent: 5317778 (1994-06-01), Kudo et al.
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5357645 (1994-10-01), Onodera
patent: 5375291 (1994-12-01), Tateyama et al.
patent: 5524313 (1996-06-01), Sato

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