Wafer scrubbing device

Details Wafer scrubbing device Wafer scrubbing device

1999-02-23

2000-07-11

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 883, 15 884, 15102, B08B 302, B08B 1102

Patent

active

RE0367672

ABSTRACT:
A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the [variable] rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.

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